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Zida Zopangira Ceramic za Zida Zofufuzira za Semiconductor
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Chonyamulira Zida za Ceramic Plate Semiconductor
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Zida za Semiconductor Zida Zosinthira za Ceramic
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Mphete Yosindikizira ya Alumina Ceramic Yoyera Kwambiri Yoyera Kwambiri Yotetezera Chisindikizo cha Chipinda Chotentha Kwambiri
Mphete yosindikizira ya ceramic ya St.Cera idapangidwa ngati njira ina m'malo mwa mphete za polymer O m'malo ovuta kwambiri komwe ma elastomer amawonongeka. Yopangidwa kuchokera ku 99.8% alumina yoyera kwambiri (Al₂O₃), mphete yosindikizira yolimba iyi imagwiritsidwa ntchito potseka mosasunthika - nthawi zambiri imagwirizanitsidwa ndi gasket yofewa yachitsulo kapena graphite - kuti ipereke vacuum yodalirika kapena yosunga mpweya pa kutentha mpaka 800°C komanso m'malo amphamvu a plasma kapena mankhwala. Zipangizozi sizimachotsa mpweya, mphamvu yayikulu yokakamiza (mphamvu yozungulira ya 361 MPa), komanso kusakhala ndi mpweya (yolimbana ndi ma halogen, ma acid, ndi alkali kupatula HF). Malo otsekera opangidwa bwino (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) amatsimikizira kukhudzana kolimba ndi zitsulo kapena zida za ceramic.
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Mphete Yoyang'ana Chamber ya Alumina Yoyera Kwambiri ya Plasma Etch & CVD Systems
Mphete yoyang'ana chipinda cha St.Cera ndi gawo lofunikira kwambiri la zida zogwiritsira ntchito mu zida za semiconductor za plasma etch, CVD, ndi PVD. Yopangidwa kuchokera ku 99.8% alumina yoyera kwambiri (Al₂O₃), mpheteyo imazungulira m'mphepete mwa wafer kuti isunge plasma ndikuwonjezera kugawa kwa ion angular, motero imawongolera kufanana kwa etch pamwamba pa wafer. Zipangizozi zimapereka kukana kwapadera kwa plasma, mphamvu yayikulu ya dielectric (15×10⁶ V/m), komanso kukhazikika kwa kutentha mpaka 1600°C, kuonetsetsa kuti kudalirika kwa nthawi yayitali kumakhala kodalirika m'malo a plasma okhala ndi fluorine kapena chlorine. ID/OD yolondola komanso kusalala (≤10 μm) zimathandiza kuti m'mphepete mwa wafer muyike bwino, kuchepetsa zolakwika m'mphepete komanso kupanga tinthu tating'onoting'ono.
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Mphete ya Alumina Ceramic Yoyera Kwambiri ya Zipinda za CVD / PVD Process
Mphete ya ceramic ya St.Cera idapangidwa mwapadera kuti igwiritsidwe ntchito m'zipinda zoyendetsera za CVD (Chemical Vapor Deposition) ndi PVD (Physical Vapor Deposition). Yopangidwa kuchokera ku 99.8% alumina yoyera kwambiri (Al₂O₃), mphete iyi imagwira ntchito ngati choyika cha chipinda, mphete yolunjika, kapena gawo la process kit kuti isunge plasma ndikuteteza makoma a chipinda kuti asakokoloke. Zipangizozi zimapereka kukana kwabwino kwa plasma, mphamvu yayikulu ya dielectric (15×10⁶ V/m), komanso kukhazikika kwa kutentha mpaka 1600°C, kuonetsetsa kuti nthawi yayitali ikugwira ntchito m'malo okhala ndi fluorine. Kulekerera koyenera (±0.05 mm pa ID/OD) ndi kusalala (≤10 μm) zimathandiza kuti m'mphepete mwa wafer muzikhala bwino, kusintha kufanana kwa malo ndi kuchepetsa kupanga tinthu.
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Bernoulli Ceramic End Effector — Kugwira Ntchito Yosakhudzana ndi Wafer kwa Wafer Woonda ndi Wofooka
Chotsukira cha St.Cera's Bernoulli ceramic end effector chimagwiritsa ntchito aerodynamic lift kuti chigwire ma wafers popanda kukhudza thupi. Chopangidwa kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃) kapena silicon carbide (SiC), chili ndi ma nozzles opangidwa bwino omwe amatulutsa mpweya wopanikizika kuti apange filimu yopyapyala pakati pa chotsukira ndi wafer. Mfundo yosakhudza iyi imachotsa kuipitsidwa kumbuyo, kusweka kwa m'mphepete, ndi kuwonongeka kwa pamwamba, zomwe zimapangitsa kuti ikhale yoyenera ma wafers owonda (≤100 μm), ofooka, kapena opotoka. Chotsukira cha ceramic chimapereka mphamvu yolimba kwambiri (361 MPa ya Al₂O₃; mpaka 550–600 MPa ya SiC), kulemera kochepa, komanso kukhazikika kwabwino kwambiri, kuonetsetsa kuti malo obwerezabwereza amayikidwa m'malo osungira ma wafers othamanga kwambiri.
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Zida Zapamwamba Zoyera za Alumina Ceramic za Semiconductor & Industrial Applications
St.Cera imapanga zida za alumina (Al₂O₃) zopangidwa mwaluso kwambiri malinga ndi zomwe makasitomala akufuna. Pogwiritsa ntchito alumina ya 99.8% yoyera kwambiri, zigawozi zimapereka mphamvu yabwino kwambiri yopindika (361 MPa), kuuma kwambiri (16 GPa), komanso mphamvu yabwino kwambiri ya dielectric (15×10⁶ V/m). Yopangidwira zida za semiconductor, ma assemblies osatha, ma insulators amagetsi, ndi zida zotenthetsera kwambiri, zinthuzi zimapereka kuyamwa kwa madzi pafupifupi zero (0%) komanso kuchuluka kwa kutentha kwa 7.2×10⁻⁶/℃, kuonetsetsa kuti kukhazikika kwa miyeso kumakhala kolimba kwambiri.
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Chophimba ...
Chidutswa cha ceramic cha St.Cera chopangidwa ndi ma porous ceramic chimapangidwa kuchokera ku alumina yoyera kwambiri yokhala ndi ma porous otseguka ofanana a 30–45% ndi kukula kwa ma pore kuyambira 10 mpaka 100 μm. Mosiyana ndi ma chucks achikhalidwe, pamwamba pa ma porous pamapereka vacuum yogawidwa kumbuyo kwa wafer yonse, ndikugwirira bwino ma wafer opindika, owonda, kapena osasunthika popanda kukwezedwa m'mphepete kapena kusweka. Vacuum yofatsa (yosinthika kudzera mu restrictor) imalepheretsanso kulemba kumbuyo.
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Chotsukira Chotsukira Chopangidwa ndi Alumina Chopangidwa ndi Porous Ceramic Chogwiritsidwa Ntchito Posapanga Wafer Woonda
Chidutswa cha alumina cha St.Cera chimapangidwa kuchokera ku 99.6% ya Al₂O₃ yoyera kwambiri yokhala ndi ma porosity otseguka olamulidwa a 30–45% ndi kukula kofanana kwa ma pore kuyambira 10 mpaka 50 μm. Mosiyana ndi ma chucks okhala ndi ma groove, pamwamba pa ma pore pamapereka vacuum yogawidwa kumbuyo kwa wafer yonse, kuchotsa chizindikiro cha m'mphepete ndikulola kuti ma wafers owonda kwambiri (≤100 μm) kapena opotoka azigwira bwino ntchito. Zipangizozi zimapereka mphamvu yopindika ≥250 MPa komanso kukhazikika kwa kutentha mpaka 400°C mumlengalenga.
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Mbale Yogawa Mafuta a Alumina ya Showerhead ya CVD/PVD
Mbale yogawa mpweya ya St.Cera (shawa) imapangidwa mwaluso kwambiri kuchokera ku alumina ceramic ya 99.8% yoyera kwambiri. Ili ndi mabowo ang'onoang'ono (aatali 0.3–1.5 mm) omwe amatsimikizira kuti mpweya umayenda mofanana pamwamba pa wafer panthawi ya CVD, PVD, kapena ALD. Mphamvu yayikulu ya dielectric ya mbaleyo (>15×10⁶ V/m) komanso kukana kwa plasma zimapangitsa kuti ikhale yofunikira kwambiri pakuyika filimu yopyapyala ya semiconductor.
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Pini Yothandizira Ceramic ya Zokonza za Semiconductor
Ma ceramic supporting pins a St.Cera's (omwe amadziwikanso kuti lift pins kapena support pins) amagwiritsidwa ntchito m'zipinda za semiconductor process kuti akweze ma wafers kapena substrates panthawi yogwira, kutentha, kapena kuzizira. Ma pin awa opangidwa kuchokera ku 99.8% alumina kapena silicon nitride amapereka mphamvu yolimba kwambiri, kukhazikika kwa kutentha, komanso kukana mankhwala. Kapangidwe ka hemispherical kapena flat nsonga kamaletsa wafer kukanda.
