Pini Yothandizira Ceramic ya Zokonza za Semiconductor
Ma ceramic supporting pins a St.Cera's (omwe amadziwikanso kuti lift pins kapena support pins) amagwiritsidwa ntchito m'zipinda za semiconductor process kuti akweze ma wafers kapena substrates panthawi yogwira, kutentha, kapena kuzizira. Ma pin awa opangidwa kuchokera ku 99.8% alumina kapena silicon nitride amapereka mphamvu yolimba kwambiri, kukhazikika kwa kutentha, komanso kukana mankhwala. Kapangidwe ka hemispherical kapena flat nsonga kamaletsa wafer kukanda.
Mafotokozedwe(Aluminiyamu 99.8%):
| Katundu | Mtengo |
| Zinthu Zofunika | 99.8% Al₂O₃ kapena Si₃N₄ |
| Utali | 10 - 100 mm |
| M'mimba mwake | 1 – 10 mm |
| Chithunzi cha Nsonga | Yathyathyathya, yozungulira, yopingasa |
| Mphamvu Yokakamiza (Al₂O₃) | >2000 MPa |
| Kutentha Kwambiri Kogwira Ntchito (Al₂O₃) | 1600°C |
| Kumaliza Pamwamba | Yozungulira (Ra ≤0.4 μm) |
| Kulekerera pa M'mimba mwake | ± 0.01 mm |
Mapulogalamu:
Ma lift pin m'zipinda za CVD/PVD
Mapini othandizira kuphika mbale yotentha
Kapangidwe kothandizira makadi a probe
Boti la ng'anjo ya quartz lothandizira
Kupanga:
Kupukuta bwino kwa OD popanda pakati → Kupukuta kwa diamondi kwa nsonga ya profayilo → kuyeretsa kwa ultrasound → Kuyang'ana 100% muyeso.
Kuwongolera Ubwino:
CMM ya kutalika/m'mimba mwake, choyerekeza cha kuwala cha nsonga ya radius, kuyesa katundu kuti zitsimikizire mphamvu yokakamiza (chitsanzo chosasinthika pa gawo lililonse). Palibe kuipitsidwa kwa ferromagnetic (kotsimikiziridwa ndi maginito).
Ubwino kuposa Zikhomo za Chitsulo kapena Quartz:
Moyo wa nthawi yayitali ndi nthawi 5 kuposa chitsulo chosapanga dzimbiri
Palibe kuipitsidwa kwa chitsulo m'chipinda chogwirira ntchito
Mphamvu yotentha kwambiri kuposa quartz (1600°C vs 1100°C)
Malo osamamatira (kuchepa kwa tinthu tomatira)
Kusintha:
Ma profiles angapo a nsonga, maziko opangidwa ndi ulusi, kapena shaft yopyapyala.
Timaperekanso ma pini a SiC m'malo ovuta kwambiri a plasma.
