Mbale Yogawa Mafuta a Alumina ya Showerhead ya CVD/PVD
Mbale yogawa mpweya ya St.Cera (shawa) imapangidwa mwaluso kwambiri kuchokera ku alumina ceramic ya 99.8% yoyera kwambiri. Ili ndi mabowo ang'onoang'ono (aatali 0.3–1.5 mm) omwe amatsimikizira kuti mpweya umayenda mofanana pamwamba pa wafer panthawi ya CVD, PVD, kapena ALD. Mphamvu yayikulu ya dielectric ya mbaleyo (>15×10⁶ V/m) komanso kukana kwa plasma zimapangitsa kuti ikhale yofunikira kwambiri pakuyika filimu yopyapyala ya semiconductor.
Mafotokozedwe:
| Katundu | Mtengo |
| Zinthu Zofunika | 99.8% Al₂O₃ kapena SiC |
| M'mimba mwake | 100 - 1500mm (yozungulira) kapena yozungulira |
| Kukhuthala | 5 - 20 mm |
| Chipinda cha dzenje | 0.3 – 1.5 mm |
| Chitsanzo cha Dzenje | Mwamakonda (makona atatu, sikweya, chozungulira) |
| Kusalala | ≤10 μm pa malo onse |
| Kuuma kwa pamwamba | Ra ≤0.6 μm (mbali ya mpweya) |
| Chiŵerengero cha Malo Otseguka | 5–15% |
Mapulogalamu:
Mbale za shawa za PECVD
Majakisoni a mpweya wa ALD
Mbale zogawa mpweya m'chipinda chokoka
Zigawo za riyakitala ya MOCVD
Kupanga:
Chopondapo cha alumina cholumikizidwa molunjika → Kuboola kwa CNC pogwiritsa ntchito zida zokutidwa ndi diamondi (kulekerera malo a dzenje ± 0.02 mm) → kuchotsa madontho → kuyeretsa kwa ultrasound → Kalasi 100 phukusi.
Kuwongolera Ubwino:
Mbale iliyonse imayesedwa 100% kuti ione kukula kwa dzenje (dongosolo lowonera), kusalala (laser interferometer), ndi kufanana kwa kayendedwe ka mpweya (kujambula kuthamanga). Palibe ming'alu yaying'ono pansi pa maikulosikopu 20.
Ubwino kuposa Mapepala Achitsulo:
Palibe kuipitsidwa kwachitsulo m'mafilimu opyapyala
Kupanga tinthu tating'onoting'ono totsika (palibe ziphuphu za dzimbiri)
Imapirira ma plasma oyeretsa mwamphamvu (CF₄, NF₃)
Zinthu Zapadera:
Mapaipi a gasi kumbuyo, mabowo obowoledwa ndi ma counter-borred, ma seal a m'mphepete, ndi mitundu yosiyanasiyana ya zinthu (SiC ya kutentha kwambiri, Y₂O₃ coating ya plasma resistance).
Timapereka chitsimikizo cha CAD ndi kuyerekezera kayendedwe ka kayendedwe ka zinthu tisanapange.
