Chophimba cha Ceramic End Effector cha Teflon – Malo Osamamatira Kuti Mugwiritse Ntchito Wafer Wosavuta
Chophimba cha St.Cera's Teflon (PTFE) chopangidwa ndi ceramic chimaphatikiza chopangira alumina champhamvu kwambiri ndi chophimba cha PTFE chofanana, chotsika (makulidwe 15–30 μm). Chophimbachi chimapereka mphamvu yochepa kwambiri ya kukangana (≤0.1), kukana mankhwala bwino, komanso mphamvu zosamatira, kuteteza kumatirira kwa wafer ndikuchotsa kuipitsidwa kumbuyo. Chophimba cha ceramic chomwe chili pansi pake (99.8% Al₂O₃) chimapereka mphamvu yolimba kwambiri (361–1000 MPa), kukana kuvala, komanso kukhazikika kwa kutentha mpaka 260°C (malire a kupaka). Chophimbachi ndi chabwino kwambiri pogwira ma wafer ofewa, owonda, kapena omata (monga, pambuyo pa kupaka kapena njira za mankhwala).
Mafotokozedwe (kutengera 99.8% Al₂O₃ substrate yokhala ndi PTFE covering):
| Katundu | Mtengo |
| Zinthu Zoyambira | 99.8% Alumina (Minyanga ya Njovu) |
| Zopangira Zophimba | PTFE (Teflon) |
| Kuphimba makulidwe | 15–30 μm |
| Koyefiyira ya Kukangana (Yophimbidwa) | ≤0.1 |
| Mphamvu Yosinthasintha ya Substrate (Al₂O₃) | 361 MPa |
| Kulimba kwa Substrate (Al₂O₃) | 16 GPa |
| Kuchuluka kwa substrate | 3.93 g/cm³ |
| Kutentha Kwambiri Kogwira Ntchito (malire a kupaka) | 260°C |
| Kukhwima kwa pamwamba (musanayambe kuphimba) | Ra ≤0.4 μm |
| Mphamvu ya Dielectric (substrate) | 15×10⁶ V/m |
Dziwani: Chophimba cha PTFE chimachepetsa kutentha kwambiri kufika pa 260°C; pakugwiritsa ntchito kutentha kwakukulu, ganizirani zophimba za ceramic zosaphimbidwa kapena zina.
Mapulogalamu:
- · Kugwira ma wafers pambuyo popaka utoto wokana kuwala (malo omata)
- · Kusamutsa ma wafers owonda kapena osalimba (kumaletsa kumamatira)
- · Zipangizo zowunikira ma semiconductor ndi metrology
- · Makina oyeretsera m'chipinda chotsukira komwe kuipitsidwa kwa tinthu kuyenera kuchepetsedwa
Njira Yopangira:
Choponderezedwa ndi ceramic substrate ndi nthaka yolondola → kuuma pamwamba (plasma etch kapena grit blast) → PTFE spray coating → kutentha kutentha pa 380°C → kuyang'aniridwa komaliza. Chothandizira chilichonse chimafufuzidwa ngati chikukuluka (eddy current), kumatira (cross-cut test ASTM D3359), ndi coefficient of friction.
Kuwongolera Ubwino:
Kuyang'ana kowona 100% kwa mabowo kapena thovu; kufanana kwa makulidwe a chophimba mkati mwa ±5 μm; palibe kudulidwa pambuyo pa mayeso opindika a 90° pa chiphaso cha umboni. Kuyang'ana kofanana ndi kulolerana kwa OEM (kutalika ±0.05 mm, kusalala ≤0.1 mm).
Ubwino kuposa Zophimba Zosaphimbidwa kapena Zina:
- · Malo osamamatira amaletsa kumatirira ndi kusweka kwa wafer
- · Kuchuluka kochepa kwambiri kwa kukangana pakati pa zokutira za ceramic
- · Kukana mankhwala bwino kwambiri (ma acid, ma base, zosungunulira)
- · Amachepetsa kupanga tinthu tating'onoting'ono mwa kupewa kusamutsa zinthu
Zoletsa (ndemanga pa kusiyana kwa zinthu):
Chophimba cha PTFE sichichokera ku matebulo azinthu zomwe zaperekedwa (Al₂O₃, ZrO₂, Si₃N₄, BeO). Zinthu zapansi zimatsatira mosamala deta yoperekedwa (99.8% Al₂O₃). Zinthu za utoto zimachokera ku zomwe zafotokozedwa mu PTFE, chifukwa palibe deta ya utoto yomwe yaperekedwa. Pamagwiritsidwe ntchito opitilira 260°C, chopangira choteteza cha ceramic chosaphimbidwa chimalimbikitsidwa.*
Kusintha:
Imapezeka m'litali 150–1500 mm, mawonekedwe a nsonga (m'mphepete mwa chigoba, Bernoulli, yosalala), mapatani a flange oyika pa chithunzi chilichonse cha OEM. Chophimba pang'ono (malo olumikizirana okha) kapena chophimba chonse mwachisawawa.
Pemphani chitsanzo kuti muyesedwe kuti mugwirizane ndi kukanda.
