Chophimba ...
Chidutswa cha ceramic cha St.Cera chopangidwa ndi ma porous ceramic chimapangidwa kuchokera ku alumina yoyera kwambiri yokhala ndi ma porous otseguka ofanana a 30–45% ndi kukula kwa ma pore kuyambira 10 mpaka 100 μm. Mosiyana ndi ma chucks achikhalidwe, pamwamba pa ma porous pamapereka vacuum yogawidwa kumbuyo kwa wafer yonse, ndikugwirira bwino ma wafer opindika, owonda, kapena osasunthika popanda kukwezedwa m'mphepete kapena kusweka. Vacuum yofatsa (yosinthika kudzera mu restrictor) imalepheretsanso kulemba kumbuyo.
Mafotokozedwe(kutengera 99.6% Al₂O₃):
| Katundu | Mtengo |
| Kuyenda pang'onopang'ono | 30–45% |
| Kukula kwa Pakati pa Ma Pore | 10–100 μm (yosankhidwa) |
| Mphamvu Yosinthasintha | ≥250 MPa |
| Kusalala (kupitirira 300mm) | ≤5 μm |
| Kumaliza Pamwamba | Yozungulira (Ra 0.8 μm) |
| Mlingo Wokwanira wa Vacuum | -80 kPa |
| Kutentha kwa Ntchito | 400°C (mpweya), 600°C (yopanda mpweya) |
| Zinthu Zofunika | 99.6% Al₂O₃, ZrO₂, kapena SiC |
Mapulogalamu:
Chopukutira chakumbuyo chopyapyala (≤50 μm)
Choyika chopindika cha wafer chopindika kuti chidulidwe
Kutola kwa die yopangidwa kuchokera ku tepi
Kusamalira gulu lagalasi
Kupanga ndi Ubwino:
Ufa wa ceramic wosakaniza ndi ma pore formers achilengedwe → wokakamizidwa → wothira → wolumikizidwa mpaka makulidwe omaliza. Chuck iliyonse imayesedwa kuti ione ngati ili yofanana ndi vacuum (≤5% deviation) ndipo imayesedwa kuti iwonetse kukula kwa ma pore (SEM). Kusalala kumayesedwa ndi laser interferometer.
Ubwino kuposa Grooved Chucks:
Palibe chizindikiro cha m'mphepete mwa wafer kapena kusintha kwa die
Imagwira ma wafer opindika (mpaka 500 μm)
Amachotsa kutsekeka kwa mabowo a vacuum
Thandizo lodziyimira pawokha la magawo owonda
Kusintha:
Mawonekedwe ozungulira kapena amakona anayi, kukula mpaka 600 mm. Titha kugwiritsa ntchito mphete zotsekera m'mphepete kapena magawo a vacuum. Mitundu yokhala ndi zitsulo ikupezeka kuti igwiritsidwe ntchito pazovuta kwambiri.
Pemphani chitsanzo cha kukula kwa wafer yanu ndi mayeso a warpage.
