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Mbali za Alumina High-Precision Ceramic Ring Ceramic
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Zipangizo Zopangira Ma Semiconductor Zopangidwa ndi ST.CERA
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Silicon Carbide (SiC) Ceramic End Effector - Kulimba Kwambiri Pogwira Ntchito Yotentha Kwambiri Yopangira Wafer
Chotsukira cha St.Cera's SiC ceramic end effector chimapangidwa kuchokera ku silicon carbide yoyera kwambiri (yomwe ili ndi SiC 99.72%, Si yaulere 0.05%) pogwiritsa ntchito zinthu za S1111 batch. Chimapereka mawonekedwe apadera a makina: mphamvu yopindika 449 MPa (yoyezedwa), elastic modulus 457 GPa (yoyezedwa), ndi kuuma kwa Vickers 25–28 GPa (yoyezedwa). Kuchuluka kochepa (3.10–3.15 g/cm³, yoyezedwa) kumapereka kuuma kwapadera, koyenera ma robot otumizira wafer othamanga kwambiri. Ndi kutentha kwa 120–150 W/m·K (yoyezedwa) ndi kutentha kwa 4.0–4.5×10⁻⁶/℃ (yoyezedwa), chotsukira ichi chimachotsa kutentha bwino ndikusunga kukhazikika kwa magawo panthawi yogwira kutentha kwambiri (mpaka 1600–1700°C, palibe katundu). Mtundu wakuda/imvi komanso kusayamwa madzi kumatsimikizira kuti chipinda choyera chikugwirizana.
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Chotsukira Chotsukira Chochokera ku Silicon Carbide (SiC) Chogwiritsidwa Ntchito Potentha Kwambiri & Malo Otentha Kwambiri
Chuck ya ceramic ya St.Cera's SiC imapangidwa kuchokera ku silicon carbide yoyera kwambiri (batch S1111, SiC 99.72%, Si yaulere 0.05%). Imapereka mphamvu yoyezera ya flexural ya 449 MPa, kulimba kwa fracture ya 3.12 MPa·m¹/², ndi elastic modulus ya 457 GPa. Kutentha kwanthawi zonse kwa zinthuzo (120–150 W/m·K) ndi kutentha kochepa (4.0–4.5×10⁻⁶/℃) zimathandiza kutentha kwachangu komanso kuwononga wafer pang'ono panthawi ya kutentha. Chuck ikhoza kukhazikitsidwa ngati chuck ya vacuum yokhala ndi porous (kutuluka kwa mpweya wofanana) kapena chuck yokhazikika. Ndi kutentha kwakukulu kogwiritsidwa ntchito kwa 1600–1700°C (palibe katundu) komanso kukana kukokoloka kwa plasma, chuck iyi ndi yabwino kwambiri pokonza wafer yotentha kwambiri (annealing, RTP) ndi zipinda za alumina zotentha kwambiri komwe alumina chucks imawonongeka.
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Zida za Semiconductor Zida Zosinthira za Ceramic Zonyamulira Ceramic
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Mphete Yopukutira ya Alumina Ceramic Yokhala ndi Chitsulo Yogwiritsidwa Ntchito ndi Ma Lapping Olimba Kwambiri
Mphete yopukusira ya alumina yochokera kuchitsulo ya St.Cera imaphatikiza alumina yoyera kwambiri (99.8% Al₂O₃) yokhala ndi chitsulo cholimba (nthawi zambiri chopangidwa ndi aluminiyamu kapena chitsulo chosapanga dzimbiri). Kapangidwe kameneka kamapereka kukana kwapadera kwa kuvala komanso kusagwira bwino ntchito kwa ceramic pamwamba popukusira, pomwe maziko achitsulo amawonjezera mphamvu yamakina, kukhazikika kosavuta, komanso kukana kusweka kwa brittle. Gawo la alumina limapereka mphamvu yopindika ya 361 MPa, kuuma kwa Vickers kwa 16 GPa, komanso kukhazikika kwa kutentha mpaka 800°C. Maziko achitsulo amapangidwa ndi mabowo omangirira, ma pini opezera, kapena mphamvu zamaginito kuti agwirizane ndi makina olumikizira, ma planetary grinders, ndi zida za CMP.
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Zida Zopangira Ceramic za Zida za Semiconductor Probe Station
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Kukonza Koyenera kwa Al2O3 Ceramic Wafer Chuck
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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ST.CERA Yopangidwa ndi Semiconductor Zida Zapadera Ceramic Plate
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Chotsukira cha Alumina cha mainchesi 12 cha 300mm Wafer Processing
Chikwama cha vacuum cha St.Cera cha mainchesi 12 chimapangidwa bwino kwambiri kuchokera ku alumina ya 99.8% yoyera bwino (Al₂O₃) kuti chigwiritsidwe ntchito ndi wafer wa 300mm. Chikwamacho chili ndi malo opindika bwino (m'lifupi mwa groove 0.5–1.0 mm, pitch 2–3 mm) kuti chitsimikizire kufalikira kwa vacuum mofanana m'mimba mwake wonse wa 300mm. Kusalala kumakhala mkati mwa 5 μm, zomwe zimathandiza kuti wafer ikhale yolimba popanda kupindika panthawi yocheka, kupukuta kumbuyo, ndi kuyang'aniridwa. Mphamvu yayikulu yopindika (361 MPa) ndi kuuma (16 GPa) kwa chinthucho zimatsimikizira kukhazikika kwa nthawi yayitali ngakhale pansi pa vacuum cycles mobwerezabwereza.
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Alumina Ceramic End Effector yokhala ndi Ma Integrated Vacuum Channels
Chotsukira cha alumina cha St.Cera chimaphatikiza njira zotsukira zokonzedwa bwino komanso mabowo okokera mwachindunji m'thupi la alumina loyera kwambiri la 99.8%. Kapangidwe kameneka kamachotsa ma vacuum pads akunja, zomwe zimathandiza kuti wafer itengeke mwachindunji ndi mphamvu yogwirira ntchito yofanana. Mphamvu yopindika kwambiri ya chinthucho (361 MPa) ndi kuuma kwake (16 GPa) zimatsimikizira kukhazikika kwa nthawi yayitali pansi pa vacuum cycles mobwerezabwereza. Kusalala kudutsa pa pad kumasungidwa mkati mwa 10 μm, kupewa kupsinjika kwa wafer ndi kusweka. Madoko otsukira ali kumbuyo kwa flange kuti agwirizane mosavuta ndi manja a loboti la OEM.
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Zida za ESD-Safe Alumina Ceramic Zothandizira Kusamalira Wafer Mosasinthasintha
Ziwalo za St.Cera's ESD (electrostatic discharge) safe alumina ceramic zimapangidwa kuchokera ku 99.8% high-purity Al₂O₃ yokhala ndi resistivity yapamwamba ya 10⁶–10⁹ Ω/sq, yomwe imapezeka kudzera mu njira yopangira doping kapena coating. Ziwalozi zimachotsa bwino mphamvu yokhazikika, kuteteza kuwonongeka kwa magetsi ku ma wafers ndi zida zina za semiconductor. Chipangizo choyambira chimasunga mphamvu yake yopindika (361 MPa), kuuma (16 GPa), ndi mphamvu ya dielectric (15×10⁶ V/m). Ziwalo za ceramic zotetezeka za ESD zimaphatikizapo ma end effectors, ma lift pini, ma guide rails, ndi zida zapadera za FAB automation.
