Silicon Carbide (SiC) Ceramic End Effector - Kulimba Kwambiri Pogwira Ntchito Yotentha Kwambiri Yopangira Wafer
Chotsukira cha St.Cera's SiC ceramic end effector chimapangidwa kuchokera ku silicon carbide yoyera kwambiri (yomwe ili ndi SiC 99.72%, Si yaulere 0.05%) pogwiritsa ntchito zinthu za S1111 batch. Chimapereka mawonekedwe apadera a makina: mphamvu yopindika 449 MPa (yoyezedwa), elastic modulus 457 GPa (yoyezedwa), ndi kuuma kwa Vickers 25–28 GPa (yoyezedwa). Kuchuluka kochepa (3.10–3.15 g/cm³, yoyezedwa) kumapereka kuuma kwapadera, koyenera ma robot otumizira wafer othamanga kwambiri. Ndi kutentha kwa 120–150 W/m·K (yoyezedwa) ndi kutentha kwa 4.0–4.5×10⁻⁶/℃ (yoyezedwa), chotsukira ichi chimachotsa kutentha bwino ndikusunga kukhazikika kwa magawo panthawi yogwira kutentha kwambiri (mpaka 1600–1700°C, palibe katundu). Mtundu wakuda/imvi komanso kusayamwa madzi kumatsimikizira kuti chipinda choyera chikugwirizana.
Mafotokozedwe(kutengera lipoti loyesa la SiC S1111 lomwe laperekedwa ndi mitengo yanthawi zonse):
| Katundu | Mtengo |
| Zinthu Zofunika | SiC (99.72% SiC, 0.05% Si Yaulere) |
| Mtundu | Chakuda/Chimvi |
| Kuchulukana | 3.10–3.15 g/cm³ |
| Kumwa Madzi | 0% |
| Mphamvu Yosinthasintha | 449 MPa (avereji) |
| Kulimba kwa Kusweka | 3.12 MPa·m¹/² (avereji) |
| Modulus Yotanuka | 457 GPa |
| Kuuma kwa Vickers | 25–28 GPa |
| Kutentha (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Kugwiritsa Ntchito Kwambiri (palibe katundu) | 1600–1700°C |
Mapulogalamu:
● Kusamalira wafer wotentha kwambiri (post-anneal, RTP, epitaxy)
● Zipinda zosungira madzi m'magazi zomwe zimafuna kuti nthaka isakokoloke kwambiri
● Maloboti othamangitsira mwachangu kwambiri (opepuka, olimba kwambiri)
Kupanga:
Kupukuta ufa wa SiC → Kupukuta molondola mawonekedwe a mkono ndi zinthu zomangira ndi CNC → Kupukuta pamwamba → Kuyeretsa ndi ultrasound. Kuyang'ana 100% ndi kuyesa kutayikira kwa helium pakugwiritsa ntchito vacuum.
Kuwongolera Ubwino:
● Kuyang'ana kwa CMM kutalika, m'lifupi, ndi kusalala
● Kuyesa mphamvu yopindika pa gulu lililonse (pa muyezo wa lipoti la mayeso)
● Kuyang'ana maso pogwiritsa ntchito maikulosikopu kuti aone ngati pali zolakwika pamwamba
Ubwino woposa Alumina kapena Chitsulo:
● 2 × modulus yolimba kwambiri (457 vs ~380 GPa ya alumina) - kupotoka kochepa
● 3 × kutentha kwakukulu - kutentha kofulumira kutaya
● Imapirira kutentha kwa >1600°C poyerekeza ndi kutentha kwa alumina kwa 800°C mumlengalenga
● Kuchuluka kochepa kuposa chitsulo - kuchepetsa kulemera kwa 40%
Kusintha:
Kutalika 150–450 mm, mawonekedwe a nsonga (kugwirizira m'mphepete, Bernoulli, lathyathyathya), mapatani a flange omangira pa chojambula cha OEM.
*Zonse zomwe zafotokozedwa pamwambapa zimachokera ku lipoti loyesa lomwe laperekedwa (gulu la S1111). Kuchuluka kwa kutentha ndi kuuma kwake ndi kofala pa giredi iyi ya SiC; chonde titumizireni ulalo kuti mupeze satifiketi yokhudza malo enieni.*
