Chotsukira Chotsukira Chochokera ku Silicon Carbide (SiC) Chogwiritsidwa Ntchito Potentha Kwambiri & Malo Otentha Kwambiri
Chuck ya ceramic ya St.Cera's SiC imapangidwa kuchokera ku silicon carbide yoyera kwambiri (batch S1111, SiC 99.72%, Si yaulere 0.05%). Imapereka mphamvu yoyezera ya flexural ya 449 MPa, kulimba kwa fracture ya 3.12 MPa·m¹/², ndi elastic modulus ya 457 GPa. Kutentha kwanthawi zonse kwa zinthuzo (120–150 W/m·K) ndi kutentha kochepa (4.0–4.5×10⁻⁶/℃) zimathandiza kutentha kwachangu komanso kuwononga wafer pang'ono panthawi ya kutentha. Chuck ikhoza kukhazikitsidwa ngati chuck ya vacuum yokhala ndi porous (kutuluka kwa mpweya wofanana) kapena chuck yokhazikika. Ndi kutentha kwakukulu kogwiritsidwa ntchito kwa 1600–1700°C (palibe katundu) komanso kukana kukokoloka kwa plasma, chuck iyi ndi yabwino kwambiri pokonza wafer yotentha kwambiri (annealing, RTP) ndi zipinda za alumina zotentha kwambiri komwe alumina chucks imawonongeka.
Mafotokozedwe(kutengera lipoti loyesa la SiC S1111 lomwe laperekedwa ndi mitengo yanthawi zonse):
| Katundu | Mtengo |
| Zinthu Zofunika | SiC (99.72% SiC, 0.05% Si Yaulere) |
| Kuchulukana | 3.10–3.15 g/cm³ |
| Kumwa Madzi | 0% |
| Mphamvu Yosinthasintha | 449 MPa |
| Kulimba kwa Kusweka | 3.12 MPa·m¹/² |
| Modulus Yotanuka | 457 GPa |
| Kuuma kwa Vickers | 25–28 GPa |
| Kutentha kwa Matenthedwe | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Kugwiritsa Ntchito Kwambiri (palibe katundu) | 1600–1700°C |
| Kusalala (kupitirira 300mm) | ≤5 μm |
| Kumaliza Pamwamba | Ra ≤0.4 μm (yozungulira) |
Mapulogalamu:
● Kupondaponda kutentha kwambiri (kupondaponda, RTP, kukula kwa epitaxial)
● Plasma etch chuck yokhala ndi kukana kwakukulu kwa fluorine
● Kugwira ntchito yopyapyala yokhala ndi kutentha/kuzizira kofanana
● Chuck yokhala ndi mabowo yothandizira wafer yosakhudzana ndi kukhudzana
Kupanga:
SiC sintering → kupukusa bwino kwa flatness ndi surface profile → kupanga kapangidwe ka ma borous (kwa vacuum chuck) → kulumikiza → kuyeretsa kwa ultrasound. Chuck iliyonse imayesedwa 100% kuti ione ngati flatness (laser interferometer) ndi vacuum yunifolomu (flow test).
Kuwongolera Ubwino:
● Kuyang'ana kukula kwa CMM (m'mimba mwake, makulidwe, malo a mabowo)
● Muyeso wa kusalala pa ASTM iliyonse
● Kuyesa kutayikira kwa helium (kwa ma vacuum chucks)
● Kutsimikizira mphamvu ya flexural pa gulu lililonse (ref. test report)
Ubwino kuposa Alumina Chucks:
● Kutentha kwakukulu (120–150 vs 32 W/m·K ya alumina) – 4 × kutentha kofulumira
● CTE Yotsika (4.0 vs 7.2×10⁻⁶/℃) – imachepetsa kutentha kwa wafer
● Kukana kwapamwamba kwa plasma - nthawi yayitali ya moyo mu fluorine etch 10 ×
● Kutentha kwakukulu kogwiritsidwa ntchito (1600°C vs 800°C ya alumina)
Kusintha:
● Malo okhala ndi mabowo kapena mipata
● M'mimba mwake 100–450 mm, wozungulira kapena wa sikweya
● Mphete yotsekera m'mphepete kapena magawo opumira ozungulira
● Njira yothandizira zitsulo kuti zikhale zolimba kwambiri
Zambiri zonse zamakina zomwe zili pamwambapa zimachokera ku lipoti loyesa lomwe laperekedwa (gulu la S1111). Mtengo wa kutentha ndi kuuma ndi wofala pa mtundu uwu wa SiC. Ma chuck a SiC okhala ndi mabowo amafunika kukonzedwanso kwina; chonde funsani ngati pali mabowo ndi kukula kwa mabowo.
