Chotsukira Chotsukira Chopangidwa ndi Alumina Chopangidwa ndi Porous Ceramic Chogwiritsidwa Ntchito Posapanga Wafer Woonda
Chidutswa cha alumina cha St.Cera chimapangidwa kuchokera ku 99.6% ya Al₂O₃ yoyera kwambiri yokhala ndi ma porosity otseguka olamulidwa a 30–45% ndi kukula kofanana kwa ma pore kuyambira 10 mpaka 50 μm. Mosiyana ndi ma chucks okhala ndi ma groove, pamwamba pa ma pore pamapereka vacuum yogawidwa kumbuyo kwa wafer yonse, kuchotsa chizindikiro cha m'mphepete ndikulola kuti ma wafers owonda kwambiri (≤100 μm) kapena opotoka azigwira bwino ntchito. Zipangizozi zimapereka mphamvu yopindika ≥250 MPa komanso kukhazikika kwa kutentha mpaka 400°C mumlengalenga.
Mafotokozedwe(kutengera 99.6% Al₂O₃):
| Katundu | Mtengo |
| Zinthu Zofunika | 99.6% Alumina (Yoyera) |
| Kuyenda pang'onopang'ono | 30–45% (yosinthika) |
| Kukula kwa Pakati pa Ma Pore | 10–50 μm |
| Mphamvu Yosinthasintha | ≥250 MPa |
| Kuchulukana | 3.88 g/cm³ |
| Kusalala (kupitirira 200mm) | ≤5 μm |
| Kutentha Kwambiri Kogwira Ntchito | 400°C (mpweya) |
| Kumaliza Pamwamba | Yozungulira (Ra ≤0.8 μm) |
Mapulogalamu:
- · Chopukutira chakumbuyo chopyapyala (≤50 μm)
- · Choyikamo chopindika cha wafer choduladula
- · Kutola die imodzi
- · Kusamalira pansi pa galasi
Kupanga:
Ufa wosakaniza ndi ma pore formers → isostatic pressing → sintering pa 1600°C → lapping mpaka makulidwe omaliza. Chuck iliyonse imayesedwa kuti ione ngati ili yofanana ndi vacuum (pressure deviation <5%) ndipo imayesedwa kuti ione ngati ili ndi ma pore size distribution (SEM).
Ubwino wake poyerekeza ndi ma chuck achikhalidwe:
- · Palibe chizindikiro chakumbuyo cha wafer kapena kusinthana kwa die
- · Imanyamula ma wafers okhala ndi ma bow okwana 500 μm
- · Malo odziyeretsa okha (mabowo satseka)
- · Thandizo lofanana limachotsa nkhawa za m'deralo
Ckusinthasintha:
Mawonekedwe ozungulira kapena a sikweya, mainchesi 100–450 mm. Mphete yotsekera m'mphepete ikupezeka kuti igwiritsidwe ntchito powongolera vacuum yozungulira.
Pemphani chitsanzo cha kukula kwa wafer yanu.
