Alumina-Based Standard Vacuum Chuck – Kulimba Kwambiri pa Machining Olondola
Chotsukira cha vacuum chopangidwa ndi alumina ichi chimapangidwa kuchokera ku 99.8% Al₂O₃, chomwe chimapereka malo osalala opanda mabowo okhala ndi mapatani apadera a vacuum groove. Chimapereka kulimba kwapadera (Young's modulus 380 GPa) komanso kusalala (≤3 μm), zomwe zimapangitsa kuti chikhale choyenera kupukutira, kulumikiza, ndi kudula ma wafers a semiconductor ndi zigawo zina zowunikira. Kutentha kwakukulu kwa chinthuchi (32 W/m·k) kumatsimikizira kuti kutentha kumakhala kofanana panthawi yokonza.
Mafotokozedwe(kutengera 99.8% Al₂O₃):
| Katundu | Mtengo |
| Zinthu Zofunika | 99.8% Alumina (Minyanga ya Njovu) |
| Kuchulukana | 3.93 g/cm³ |
| Mphamvu Yosinthasintha | 361 MPa |
| Kuuma kwa Vickers | 16 GPa |
| Modulus ya Achinyamata | 380 GPa |
| Kutentha kwa Matenthedwe | 32 W/m·k |
| Kusalala | ≤3 μm (kupitirira 200mm) |
| Kukhwima kwa pamwamba (mbali ya chuck) | Ra ≤0.4 μm |
| Kutentha Kwambiri Kogwira Ntchito | 800°C |
Mapulogalamu:
- · Kupera kumbuyo kwa chidebe cha wafer (cholimba komanso chosalala)
- · Kudula bwino zinthu zosweka
- · Kulumikiza zinthu zadothi
- · Kupukuta magalasi a kuwala
Kupanga:
Kulumikiza mbali zonse ziwiri molondola → kulumikiza diamondi (ngati mukufuna) → kuzungulira m'mphepete → kuyeretsa kwa ultrasound → kuyang'anira kusalala 100% ndi laser interferometer.
Aubwino:
- · Thandizo lolimba limachepetsa kupotoka pansi pa katundu
- · Palibe kupanga tinthu kuchokera ku kapangidwe ka ma porous
- · Yosavuta kuyeretsa (yogwirizana ndi zosungunulira ndi zotsukira)
- · Ma groove opangidwa ndi vacuum omwe angasinthidwe (concentric, radial, custom patterns)
Makulidwe Omwe Akupezeka:
Chozungulira: 100mm, 150mm, 200mm, 300mm; lalikulu/lamakona anayi ngati mungafune.
Timaperekanso mitundu yopangidwa ndi chitsulo kuti ikhale ndi mphamvu zambiri zamakanika.
