Alumina Vacuum Chuck Yopangira Kudula ndi Kupera Moyenera

Chotsukira cha alumina cha St.Cera chimapangidwa kuchokera ku 99.8% ya Al₂O₃ yoyera kwambiri yokhala ndi ma groove opangidwa mwaluso. Mphamvu yathu yopukusira molondola imafikira kuphwanyika kwa 0.003mm ndi kufanana kwa 0.002mm, kuonetsetsa kuti wafer imakhazikika popanda kupindika panthawi yodula, kupukuta kumbuyo, ndi kuyang'aniridwa. Zipangizozi zimapereka mphamvu yopindika kwambiri (361 MPa), kuuma (16 GPa), komanso kukhazikika kwa kutentha mpaka 800°C. Imapezeka mu mawonekedwe ozungulira mpaka 600mm external diameter (OD) ndi mawonekedwe amakona anayi mpaka kutalika kwa 1500mm. Ma groove opukusira amapangidwa mwapadera (concentric, radial, kapena grid patterns) kuti agwirizane ndi zofunikira zinazake. Chuck iliyonse imayesedwa ndi laser interferometer ndipo imaperekedwa ndi lipoti lotsimikizira kuphwanyika.

Mafotokozedwe (ochokera pa 99.8% Al₂O₃& St.Cera kupanga zinthu):

Mapulogalamu:

• · Kudula ndi kulemba ma wafer (200mm/300mm ndi kukulirapo)
• · Kupukuta kumbuyo kwa ma wafers owonda
• · Kuyang'anira ndi kufufuza maso
• · Kusamalira kwakukulu kwa substrate

Kupanga Molondola:

• · Kuwongoka: 0.005mm
• · Kukhazikika: 0.005mm
• · Kuzungulira: 0.002mm
• · Kuzungulira: 0.01mm