Chotsukira Kwambiri cha Alumina Ceramic Chothandiza pa Maloboti Ogwira Ntchito Zakuthwa

Chopangira cha alumina cha St.Cera's alumina ceramic end effector chimapangidwa molondola kuchokera ku 99.8% high-purity Al₂O₃ pogwiritsa ntchito zida zapamwamba za CNC 5-axis. Mphamvu zathu zopangira zimaphatikizapo makina opukutira molondola ndi malo opangira ma CNC, zomwe zimathandiza kuti ma geometries ovuta akhale olondola kwambiri. Chopangirachi chili ndi mawonekedwe opyapyala (oonda ngati 1.5 mm) okhala ndi m'mphepete wocheperako kuti chiyike wafer yosalala. Zipangizozi zimapereka kuuma kwakukulu (Young's modulus 380 GPa), kukana kuvala bwino, komanso kukhazikika kwa kutentha mpaka 800°C. Chigawo chilichonse chimapangidwa molondola kuti chikhale chosalala cha 0.003mm, kufanana kwa 0.002mm, ndi kutha kwa pamwamba kwa Ra0.1, kuonetsetsa kuti wafer imalumikizana bwino komanso kuti igwire ntchito popanda tinthu m'malo osungira ma semiconductor FAB. Imapezeka kutalika kuyambira 150 mm mpaka 450 mm, yokhala ndi ma geometries apadera (m'mphepete, Bernoulli, flat) ndi ma flanges oyika kuti agwirizane ndi ma robot a OEM. Zosankha zomaliza pamwamba zimaphatikizapo chophimba chopindika, chopukutidwa, kapena cha ESD dissipative (10⁶–10⁹Ω/sq).

Mafotokozedwe (ochokera pa 99.8% Al₂O₃& St.Cera kupanga zinthu):

Mapulogalamu:

• · Kusamutsa ma wafer mu maloboti opanda mpweya komanso ozungulira
• · Zopangira zokha za FAB za ma wafer a 200mm/300mm
• · Kugwira ntchito yopyapyala (ndi njira ya ESD)

Luso Lopanga:
Makina athu opukutira molondola komanso malo opangira makina a CNC amathandiza kupanga zida zovuta zadothi zokhala ndi:

• · Kutalika kwakukulu kwa makina: 1500mm
• · M'mimba mwake wakunja kwambiri: 600mm
• · M'mimba mwake wamkati wocheperako: 0.2mm
• · Kulemera kwakukulu: 100mm

Kuwongolera Ubwino:
Kuwongoka 0.005mm, kupingasa 0.005mm, kuzungulira 0.002mm, kufanana 0.002mm, kukhazikika 0.01mm kwatsimikiziridwa ndi CMM. Chigawo chilichonse chimatsukidwa ndi ultrasound ndipo chipinda chotsukira cha Class 100 chimayikidwa.