Bernoulli Ceramic End Effector — Kugwira Ntchito Yosakhudzana ndi Wafer kwa Wafer Woonda ndi Wofooka

Chotsukira cha St.Cera's Bernoulli ceramic end effector chimagwiritsa ntchito aerodynamic lift kuti chigwire ma wafers popanda kukhudza thupi. Chopangidwa kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃) kapena silicon carbide (SiC), chili ndi ma nozzles opangidwa bwino omwe amatulutsa mpweya wopanikizika kuti apange filimu yopyapyala pakati pa chotsukira ndi wafer. Mfundo yosakhudza iyi imachotsa kuipitsidwa kumbuyo, kusweka kwa m'mphepete, ndi kuwonongeka kwa pamwamba, zomwe zimapangitsa kuti ikhale yoyenera ma wafers owonda (≤100 μm), ofooka, kapena opotoka. Chotsukira cha ceramic chimapereka mphamvu yolimba kwambiri (361 MPa ya Al₂O₃; mpaka 550–600 MPa ya SiC), kulemera kochepa, komanso kukhazikika kwabwino kwambiri, kuonetsetsa kuti malo obwerezabwereza amayikidwa m'malo osungira ma wafers othamanga kwambiri.

Chidziwitso pa Zipangizo:Alumina (Al₂O₃) ndi chinthu chomwe chimagwiritsidwa ntchito kwambiri popanga zinthu zomangira za ceramic pakugwiritsa ntchito wafer ya semiconductor chifukwa cha kuphatikiza kwake bwino kwa kuuma, kutchinjiriza magetsi, kukhazikika kwa mankhwala, komanso kugwiritsa ntchito bwino ndalama. Silicon carbide (SiC) imapereka mphamvu yotenthetsera kutentha kwambiri, kuuma kwambiri, komanso kukana kuvala bwino kwambiri pazinthu zovuta kwambiri. Ngakhale zirconia yokhazikika ya yttria (ZrO₂) imapereka kuuma kwakukulu kwa kusweka kwa fracture kutentha kwa chipinda, siigwiritsidwa ntchito kawirikawiri pakugwiritsa ntchito izi chifukwa cha kuchuluka kwake kwakukulu komanso mawonekedwe osiyanasiyana a kutentha; ikhoza kuganiziridwa pazochitika zinazake pomwe kuuma kwakukulu kwa kusweka kumafunika. Chonde funsani gulu lathu laukadaulo kuti mudziwe malangizo osankha zinthu.

Mafotokozedwe(kutengera 99.8% Al₂O₃):

Mfundo Yogwirira Ntchito:

Mpweya wopanikizika kapena nayitrogeni (0.2–0.6 MPa) umaperekedwa kudzera m'njira zamkati ndi zotuluka kudzera m'ma nozzles olondola. Kuyenda kwa mpweya mwachangu kumapanga malo otsika mphamvu pamwamba pa effector yomaliza (Bernoulli effect), ndikupanga mphamvu yokweza yomwe imathandizira wafer pamalo okwana 50–200 μm. Palibe mabowo a vacuum kapena ma pads omwe amakhudza wafer kumbuyo.

Mapulogalamu:

• · Kugwira ntchito yopyapyala (≤50 μm) mukamaliza kupukuta kumbuyo
• · Kunyamula wafer wopotoka (monga, pambuyo pa CVD kapena annealing)
• · Kusamutsa maselo a dzuwa ndi ma LED a safiro substrate
• · Makina oyeretsa omwe amafunikira kupanga tinthu topanda kanthu
• · Kupanga magalasi opangira zinthu zowonetsera

Njira Yopangira:

Chotsukira cha ceramic chopangidwa kuchokera ku ufa woyeretsedwa kwambiri → 5-axis CNC machining ya njira za gasi ndi mabowo a nozzle (m'mimba mwake 0.3–1.0 mm, kulolerana ± 0.01 mm) → kulumikiza pamwamba mpaka Ra ≤0.4 μm → kuyeretsa kwa ultrasonic → mayeso a helium leak (njira za gasi). Palibe chophimba chofunikira - pamwamba pa ceramic yopanda kanthu ndi yopanda mankhwala ndipo siidetsa.

Kuwongolera Ubwino:

• · Kuyang'anira 100% (CMM) kwa malo a nozzle, kutalika kwa mkono, ndi kusalala
• · Kuyesa kufanana kwa kayendedwe ka mpweya: kutsika kwa kuthamanga kwa mpweya ≤5% pa nozzles zonse
• · Kuyesa kutayikira: njira za gasi zotsekedwa pa 0.6 MPa, palibe kutsika kwa kuthamanga kwa mpweya kwa masekondi 30
• · Kuyang'ana maso pogwiritsa ntchito maikulosikopu ya 20 × kuti mudziwe ming'alu yaying'ono kapena ma burrs

AUbwino wa Zokhudza Kulumikizana Kwachizolowezi:

• · Palibe kuipitsidwa kwa mbali yakumbuyo ya wafer — palibe kukhudzana ndi makina
• · Palibe kusweka kapena kusweka kwa ma wafers owonda
• · Imagwirira ma wafer opindika (mpaka 1 mm) yokhala ndi mpata wokhazikika
• · Imachotsa jenereta ya vacuum ndi kukonza chuck yokhala ndi porous
• · Kapangidwe ka ceramic kamalimbana ndi kuwonongeka ndi kuukiridwa ndi mankhwala

Kusintha:

• · Ikupezeka pa kukula kwa 200 mm, 300 mm, kapena kukula kwa wafer wopangidwa mwamakonda
• · Mapangidwe a nozzle ya gasi: mitundu yowongoka, yopingasa, kapena ya vortex
• · Zipangizo: alumina (yokhazikika) kapena silicon carbide (yothandizira kutentha kwambiri komanso kukana kuvala)
• · Kutalika kwa mkono, flange yoyikira, ndi malo a doko la gasi pa chojambula cha OEM

Zoletsa:

Kukhazikitsa mfundo ya Bernoulli (kapangidwe ka nozzle, mpweya wochepa) sikuli bwino kuposa matebulo a zinthu zomwe zaperekedwa. Kapangidwe ka makina ndi kutentha komwe kali pamwambapa kumatsatira mosamala ma datasheet omwe aperekedwa a 99.8% Al₂O₃. Palibe kuwonongeka kwa magwiridwe antchito a ceramic pansi pa mpweya wopanikizika komwe kukuyembekezeka kutengera zinthu izi. Kwa ma wafer omwe amakhudzidwa ndi kayendedwe ka mpweya (monga MEMS yokhala ndi kapangidwe kofooka), kapangidwe ka mpweya ndi nozzle ziyenera kusinthidwa moyenerera.