Mphete Yosindikizira ya Alumina Ceramic Yoyera Kwambiri Yoyera Kwambiri Yotetezera Chisindikizo cha Chipinda Chotentha Kwambiri
Mphete yosindikizira ya ceramic ya St.Cera idapangidwa ngati njira ina m'malo mwa mphete za polymer O m'malo ovuta kwambiri komwe ma elastomer amawonongeka. Yopangidwa kuchokera ku 99.8% alumina yoyera kwambiri (Al₂O₃), mphete yosindikizira yolimba iyi imagwiritsidwa ntchito potseka mosasunthika - nthawi zambiri imagwirizanitsidwa ndi gasket yofewa yachitsulo kapena graphite - kuti ipereke vacuum yodalirika kapena yosunga mpweya pa kutentha mpaka 800°C komanso m'malo amphamvu a plasma kapena mankhwala. Zipangizozi sizimachotsa mpweya, mphamvu yayikulu yokakamiza (mphamvu yozungulira ya 361 MPa), komanso kusakhala ndi mpweya (yolimbana ndi ma halogen, ma acid, ndi alkali kupatula HF). Malo otsekera opangidwa bwino (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) amatsimikizira kukhudzana kolimba ndi zitsulo kapena zida za ceramic.
Mafotokozedwe(kutengera 99.8% Al₂O₃):
| Katundu | Mtengo |
| Zinthu Zofunika | 99.8% Alumina (Minyanga ya Njovu) |
| Kuchulukana | 3.93 g/cm³ |
| Kumwa Madzi | 0% |
| Mphamvu Yosinthasintha | 361 MPa |
| Mphamvu Yokakamiza (yoyesedwa) | >2000 MPa |
| Kuuma kwa Vickers | 16 GPa |
| Kuwonjezeka kwa Kutentha (25–1000°C) | 7.2×10⁻⁶/℃ |
| Kutentha Kwambiri Kwambiri | 800°C (mpweya), 1600°C (yopanda mpweya) |
| Kumaliza Pamwamba (kutseka nkhope) | Ra ≤0.2 μm (yozungulira) |
| Kusalala (pa 25 mm) | ≤5 μm |
| Chiŵerengero cha Kutuluka kwa Helium | <1×10⁻¹⁰ Pa·m³/s (ndi gasket yoyenera) |
Mapulogalamu:
- · Zisindikizo zosakhazikika za chipinda cha semiconductor process (CVD, PVD, etch)
- · Zitseko za ng'anjo yotentha kwambiri
- · Ma flange otulutsira mpweya
- · Kutseka kwa zombo za reactor ya mankhwala
Njira Yopangira:
Kukanikiza kosasinthasintha → kufinya pa 1600°C → kulumikiza bwino mbali ziwiri kuti mupeze nkhope zomata bwino komanso zosalala → kufinya m'mphepete → kuyeretsa kwa ultrasound. Mphete iliyonse imayesedwa 100% pa chowunikira kutuluka kwa helium ndi gasket yachitsulo yokhazikika.
Kuwongolera Ubwino:
- · Kuyang'ana kwa CMM (ID, OD, makulidwe, kufanana)
- · Profilometer ya pamwamba pa Ra ndi waviness
- · Kuyeza kusalala pogwiritsa ntchito kuwala kosalala
- · Kuyesa kutayikira kwa helium (njira yochepetsera kupanikizika kwa msana)
Ubwino kuposa mphete za Polymer O:
- · Imapirira 800°C vs. <300°C pa FFKM
- · Palibe mpweya woipa — palibe kuipitsidwa kwa malo opanda mpweya
- · Yosagonjetsedwa ndi mankhwala onse a plasma (fluorine, chlorine, oxygen)
- · Palibe kukanikiza kapena kusintha kosatha
- · Nthawi yopanda malire yotumikira m'malo oyera
Zoletsa (Ndemanga Zofunika Kwambiri):
- · Si mphete ya O— ndi mphete yolimba ya ceramic yomwe imafuna gasket yofewa (mkuwa, aluminiyamu, kapena graphite) kuti itseke.
- · Sichimalola kuyenda kwamphamvu kapena kusakhazikika kwa flange yayikulu.
- · Mtengo woyambira wokwera kuposa mphete za polymer O, koma nthawi yayitali imachepetsa mtengo wa umwini.
- · Chogwira cholimba — mosamala; pewani kugwedezeka kapena kupindika.
Zindikirani:Deta yomwe ili pamwambapa ikutsatira bwino tebulo la katundu wa Al₂O₃ lomwe laperekedwa. Palibe deta ya zinthu za elastomeric yomwe inaperekedwa. Chogulitsachi ndi mphete yosindikizira yosasinthika, osati mphete ya elastomeric O-ring. Chonde tsimikizirani ngati izi zikukwaniritsa zofunikira zanu.
