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Chida Cholimba cha Alumina Ceramic Robot Arm Choyera Kwambiri Chogwiritsira Ntchito Wafer
Mkono wa robot wa alumina wa St.Cera wapangidwa molondola kuchokera ku 99.8% Al₂O₃ (alumina) yoyera kwambiri. Umaphatikiza mphamvu yofewa kwambiri (361 MPa), kuuma kwambiri (16 GPa), ndi kukhuthala kochepa (3.93 g/cm³), zomwe zimapangitsa kuti mkonowo ukhale wopepuka koma wolimba kuti usamutse wafer wa semiconductor. Kuchuluka kwa kutentha kwa chinthucho (7.2×10⁻⁶/°C) kumafanana ndi silicon, zomwe zimachepetsa kusagwirizana kwa kutentha panthawi yokonza.
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Bernoulli Ceramic End Effector — Kugwira Ntchito Yosakhudzana ndi Wafer kwa Wafer Woonda ndi Wofooka
Chotsukira cha St.Cera's Bernoulli ceramic end effector chimagwiritsa ntchito aerodynamic lift kuti chigwire ma wafers popanda kukhudza thupi. Chopangidwa kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃) kapena silicon carbide (SiC), chili ndi ma nozzles opangidwa bwino omwe amatulutsa mpweya wopanikizika kuti apange filimu yopyapyala pakati pa chotsukira ndi wafer. Mfundo yosakhudza iyi imachotsa kuipitsidwa kumbuyo, kusweka kwa m'mphepete, ndi kuwonongeka kwa pamwamba, zomwe zimapangitsa kuti ikhale yoyenera ma wafers owonda (≤100 μm), ofooka, kapena opotoka. Chotsukira cha ceramic chimapereka mphamvu yolimba kwambiri (361 MPa ya Al₂O₃; mpaka 550–600 MPa ya SiC), kulemera kochepa, komanso kukhazikika kwabwino kwambiri, kuonetsetsa kuti malo obwerezabwereza amayikidwa m'malo osungira ma wafers othamanga kwambiri.
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Chophimba cha Ceramic End Effector cha Teflon – Malo Osamamatira Kuti Mugwiritse Ntchito Wafer Wosavuta
Chophimba cha St.Cera's Teflon (PTFE) chopangidwa ndi ceramic chimaphatikiza chopangira alumina champhamvu kwambiri ndi chophimba cha PTFE chofanana, chotsika (makulidwe 15–30 μm). Chophimbachi chimapereka mphamvu yochepa kwambiri ya kukangana (≤0.1), kukana mankhwala bwino, komanso mphamvu zosamatira, kuteteza kumatirira kwa wafer ndikuchotsa kuipitsidwa kumbuyo. Chophimba cha ceramic chomwe chili pansi pake (99.8% Al₂O₃) chimapereka mphamvu yolimba kwambiri (361–1000 MPa), kukana kuvala, komanso kukhazikika kwa kutentha mpaka 260°C (malire a kupaka). Chophimbachi ndi chabwino kwambiri pogwira ma wafer ofewa, owonda, kapena omata (monga, pambuyo pa kupaka kapena njira za mankhwala).
