Kuphatikizidwa ndi zabwino zonse za Al2O3 ndi BeO substrate zipangizo, Aluminium Nitride(AlN) ceramic, yomwe imakhala ndi matenthedwe apamwamba (monocrystal's theoretical thermal conductivity ndi 275W/m▪k, polycrystal's theoretical thermal conductivity ndi 70~k210W/m ), kutsika kwa dielectric pafupipafupi, kukulitsa kwamafuta komwe kumayenderana ndi silikoni imodzi ya crystal, komanso zida zabwino zotchinjiriza zamagetsi, ndizinthu zabwino zopangira magawo ozungulira ndikuyika mumakampani opanga ma microelectronics.Ndiwofunikanso pazigawo zotentha kwambiri za ceramic chifukwa cha kutentha kwambiri kwamakina, katundu wamatenthedwe komanso kukhazikika kwamankhwala.
Theoretical density of AlN ndi 3.26g/cm3, kuuma kwa MOHS ndi 7-8, kutentha kwa chipinda ndi kwakukulu kuposa 1016Ωm, ndipo kuwonjezereka kwa kutentha ndi 3.5 × 10-6 / ℃ (kutentha kwa chipinda 200 ℃).Zoumba zoyera za AlN ndizopanda utoto komanso zowonekera, koma zitha kukhala mitundu yosiyanasiyana ngati imvi, yotuwa yoyera kapena yachikasu chopepuka, chifukwa cha zonyansa.
Kuphatikiza pa matenthedwe apamwamba, ma ceramics a AlN alinso ndi izi:
1. Kutsekemera kwamagetsi kwabwino;
2. Kukula kofananira kofananako kwamafuta ndi silicon monocrystal, wapamwamba kuposa zida monga Al2O3 ndi BeO;
3. Mphamvu zamakina apamwamba komanso mphamvu yosinthira yofananira ndi zida zadothi za Al2O3;
4. Kutaya kwapakati kwa dielectric ndi dielectric;
5. Poyerekeza ndi BeO, kutentha kwa matenthedwe a AlN ceramics sikukhudzidwa kwambiri ndi kutentha, makamaka pamwamba pa 200 ℃;
6. Kutentha kwakukulu kwa kutentha ndi kukana kwa dzimbiri;
7. Zopanda poizoni;
8. Igwiritsidwe ntchito pamakampani opanga ma semiconductor, makampani opanga zitsulo zamagetsi ndi magawo ena amakampani.
Nthawi yotumiza: Jul-14-2023